Electron Beam Evaporation
Electron beam (e-beam) evaporation is a time-tested deposition technology for producing dense, high purity coatings.
How it works.
During an e-beam evaporation process, current is first passed through a tungsten filament, leading to joule heating and electron emission.
- High voltage is applied between the filament and the hearth to accelerate these liberated electrons toward the crucible containing the material to be deposited.
- A strong magnetic field focuses the electrons into a unified beam; upon arrival, the energy of this beam of electrons is transferred to the deposition material, causing it to evaporate (or sublimate) and deposit onto the substrate.
-
Adding a partial pressure of reactive gas, such as oxygen or nitrogen, to the chamber during evaporation can be used to reactively deposit non-metallic films.
Advantages
High Temperatures
The e-beam source is capable of heating materials to much higher temperatures than is possible using a resistive boat or crucible heater. This allows for very high deposition rates and evaporation of high-temperature materials and refractory metals such as tungsten, tantalum, or graphite.Â
Purity of Source Material
Films deposited by electron beam evaporation can better maintain the purity of the source material; water cooling of the crucible tightly confines the electron beam heating to only the area occupied by the source material, eliminating any unwanted contamination from neighbouring components.
Variety of Sizes and Configurations
Electron beam evaporation sources are available in a variety of sizes and configurations including single or multiple pockets. Pocket indexing using a motorized carousel allows one source to deposit many materials from a single source location.
E-beam evaporation is available on a variety of PVD platforms and for many applications, including metallization, dielectric coating, optical coatings, and Josephson Junctions.
Configurations & Fixturing Options
This technology is available in various source configurations and is compatible with many Angstrom Engineering® process control capabilities and advanced fixturing options.
Process Control Software
Aeres® Angstrom Engineering's® advanced process control software has been specifically configured with features and capabilities unique to high-performance deposition.
Configurations & Fixturing Options
This technology is available in various source configurations and is compatible with many Angstrom Engineering® process control capabilities and advanced fixturing options.
Process Control Software
Aeres®, Angstrom Engineering's® advanced process control software, has been specifically configured with features and capabilities unique to high-performance deposition.
Electron Beam is available on the following platforms.