Quantum Series

Angstrom Engineering has developed a series of platforms that provide quantum computing hardware pioneers a means to reliably and confidently create superconducting circuits, and their supporting hardware, in a highly repeatable and automated framework. 

Next Generation JJs, superconducting sputtering, & Indium Bumps

The Quantum Series of physical vapor deposition platforms cover a variety of fabrication processes vital in quantum computing research and commercial development. A Quantum series system can focus on one fabrication process, or include several in-situ. We regularly manufacture and deliver Quantum Series systems specific to aluminum-based Josephson junctions, sputtering superconducting materials like niobium, as well as systems dedicated to fabricating indium bump bonds.


It has been a pleasure for us at Hebrew University to do business with Angstrom Engineering: young people, fully motivated, and providing first class service. Angstrom was selected after a tight purchase process among several known companies. The process involved many interactions and demonstrations on real, complex samples. Their performance and attitude during the whole process was flawless. Our Quantum Series Evaporator was just installed and now our researchers have the right tool for our work.”

Dr. Shimon Eliav - Hebrew University of Jerusalem

  • Deposit high quality superconducting electrodes

Whatever your choice of superconductor, Angstrom Engineering's process sources are uniquely tuned for the task. Our multi-pocket electron beam (e-beam) sources have a proven track record for fabricating aluminum-based junctions. Our partners have successfully and consistently utilized our sputter process framework in order to create films of superconducting niobium. All aspects of deposition source management are simply controlled through Aeres, our advanced process control software.

  • Grow Uniform Tunnel Junctions

The Quantum Series Josephson junction fabrication platform employs a number of features to ensure repeatable growth of pure, uniform oxide layers. We can accommodate static oxidation, dynamic oxidation, as well as plasma and UV/ozone oxidation. We employ a robust gas purification system, real time oxide growth monitoring, and direct optical wafer temperature monitoring allowing oxides that are customizable, repeatable, and reliable.   

  • Precise Shadow Evaporation

With more than 80 tilting stages for shadow evaporation deployed on systems all around the world, Angstrom has refined our design to create an extremely repeatable, versatile, and robust fixture. With the Quantum Series Josephson junction fabrication platform, a number of process enhancements are available including substrate heating, cooling, and biasing.

Variable angle stages allow for very powerful thin film techniques. However, one of its biggest challenges is reproducibility. The substrate is often set at a very oblique angle in relation to the source, and the films are very sensitive to the precision of this angle. If it’s off by even half a degree, it will affect the morphology of these nanostructures considerably. Angstrom went to great lengths to refine the tolerances of the tilt angle, improving it from a variation of up to a full degree on non-Angstrom systems I’ve used, to less than 0.1 degree. Those wonderfully narrow tolerances allow us to repeatedly create very precise nanostructures. I can say wholeheartedly, the product and service Angstrom Engineering delivered has been amazing.

Dr. Steven Jim – University of California Irvine

Related Product: Indium Bump Fabrication

We manufacture automated evaporation systems dedicated to Indium bump bonds and flip chips, particularly as they relate to quantum device fabrication.

  • Repeatable, controlled fabrication

  • Control station PC manages each control variable on Quantum Series, including deposition sources, ion sources, power output, angular positioning, and oxidation processes.
  • Simple to use yet highly advanced integrated software platform
  • PC/PLC controlled recipes for single, batch, or automated processes
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • Feedback from optical monitor, ellipsometer, or QCM automatically tracked and recorded
  • Complex recipes can be created and modified easily
  • Automatic PID control loop tuning significantly reduces process development time

  • 3D Transmon Qubit


The Josephson junctions our partners have fabricated measure up to established qubit benchmarks. These qubits were fabricated using Quantum Series equipment and were independently characterized by the Institute for Quantum Computing (IQC) at the University of Waterloo, Ontario Canada.

Please get in touch and we can collaborate on your project
When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We're looking forward to hearing from you: