Systems

The PVD (physical vapor deposition), CVD (chemical vapor deposition), and other vacuum systems created by Angstrom Engineering are suitable for a wide variety of applications including thin film deposition research, 2D materials growth such as graphene and nanotubes, industrial coatings, OLED, photovoltaic and Perovskite research. Other offerings cover applications including space simulation and controlled environments for plant growth.

Nebula Series

Semi/fully automated cluster

Every type of vacuum module, connected.

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Cluster physical vapor deposition system with many chambers

Covap PVD Platform

Small but mighty.

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Approximately waist height physical vapor deposition system with thermal sources

Nexdep PVD Platform

A compact, economical, and fully featured PVD workhorse.

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Image of Nexdep PVD physical vapor thin film deposition system

Amod PVD Platform

Not too big, not too small. It’s just right.

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Image of Amod PVD physical vapor thin film deposition system

Evovac PVD Platform

Anything is possible with this PVD titan.

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Image of EvoVac PVD physical vapor thin film deposition system

Box Coaters

Form Factors for your application. Batch throughput.

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Image of large box coater PVD physical vapor thin film deposition system

Quantum Series

Next Generation Qubit Fabrication

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Image of large box coater PVD physical vapor thin film deposition system

Linear Sputter

This system features huge rectangular sputter sources in line and can handle recipes for much larger substrates in automated batches.

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Image of Linear sputter PVD physical vapor thin film deposition system

LPCVD

CNT’s, Graphene, and other novel material fabrication.

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Image of LPCVD low pressure chemical vapor deposition system

Space Simulation

Environmental control for testing space equipment and exploring fundamental inquiry.

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Image of rectangular space and environmental simulation vacuum chamber

Plant Growth

Gives biologists the ability to create any environment in which to conduct their life research.

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Plant growth chamber that controls all major variables pertinent to biological study of plants