Nebula Cluster Integrated Vacuum System

Angstrom’s pinnacle of automation, engineering precision, user control, and collaboration with you, our partner. These Nebula Cluster integrated vacuum systems are designed specifically to meet our clients process requirements. The number and type of vacuum modules are customer selected and provide room for future expansion potential.

Cluster physical vapor deposition system with multiple vacuum chambers and glovebox

We dream with you to determine the modules that will bring your potential innovations to reality. PVD, CVD, ALD, masking and parking transfer, stages with heating/cooling, sources that assist with cleaning, variable angle deposition and everything else current technology allows. Plus, the Nebula Cluster integrated vacuum system includes a centralized robotic hub connecting everything, all controlled with our integrated and simple to use recipe-driven software.

Limits: there aren’t any.

  • Process Module Options

  • Substrate cleaning and preparation using plasma or ion beam sources
  • Multiple vacuum deposition modules are available for PVD, CVD, ALD, & application focused modules, such as Quantum Series
  • Substrate and mask storage cassettes can accommodate 25 or more sample trays as needed
  • Distribution modules using SCARA robots are sized to meet your requirements
  • Glovebox environments can be integrated to one or more modules
Cluster physical vapor deposition system with multiple vacuum chambers and glovebox, capable of atomic layer deposition ald
Purple argon plasma from a rectangular sputter cathode
  • Substrate Size/Throughput

  • We have built modules that accommodate standard semiconductor wafer form factors, as well as typical display glass, including modules for Gen. 2 (360 mm x 465 mm) and larger.
  • Throughput depends on process duration and complexity. However, the AERES software platform optimizes layer to layer transitions to reduce overall process time

  • Aeres® Advanced Process Control Software

Screenshot of Aeres, a software platform that supports Angstrom Engineering's Physical vapor deposition systems
  • Simple to use yet highly sophisticated
  • PC/PLC controlled recipes for single, batch, or automated processes
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High resolution control provides impressive low rate stability and consistent doping ratios
  • Central control station manages each module and schedules the processes in each chamber
  • Independent control of multiple chambers
  • Complex recipes can be created and modified easily
  • Automatic PID control loop tuning significantly reduces process development time

Click above links to learn more about how Aeres handles automation on Nebula Cluster integrated vacuum systems.

From the time it was delivered, this laboratory system has performed nearly flawlessly, arguably extending our capabilities well beyond those currently attainable by any organic thin film laboratory in the world. I attribute the success of this entire system to the excellence of the engineering as well as the cooperative nature of the Angstrom team in taking our best designs and making them better during the system construction process.

Dr. Stephen Forrest – University of Michigan

This short video showcases the Nebula Cluster system in action.

Speaking with us is the most efficient way to determine how you can best move forward.

When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you: