Nebula Cluster Integrated Vacuum System
Angstrom’s pinnacle of automation, engineering precision, user control, and collaboration with you, our partner. These Nebula Cluster integrated vacuum systems are designed specifically to meet our clients process requirements. The number and type of vacuum modules are customer selected and provide room for future expansion potential.
We dream with you to determine the modules that will bring your potential innovations to reality. PVD, CVD, ALD, masking and parking transfer, stages with heating/cooling, sources that assist with cleaning, variable angle deposition and everything else current technology allows. Plus, the Nebula Cluster integrated vacuum system includes a centralized robotic hub connecting everything, all controlled with our integrated and simple to use recipe-driven software.
Limits: there aren’t any.
Process Module Options
Aeres® Advanced Process Control Software
Click above links to learn more about how Aeres handles automation on Nebula Cluster integrated vacuum systems.
From the time it was delivered, this laboratory system has performed nearly flawlessly, arguably extending our capabilities well beyond those currently attainable by any organic thin film laboratory in the world. I attribute the success of this entire system to the excellence of the engineering as well as the cooperative nature of the Angstrom team in taking our best designs and making them better during the system construction process.
Dr. Stephen Forrest – University of Michigan
This short video showcases the Nebula Cluster system in action.
LET’S DISCUSS YOUR PROJECT!
Speaking with us is the most efficient way to determine how you can best move forward.
When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you: