Platforms

Platforms

Covap

Nexdep

Amod

EvoVac

Box Coater

Nebula

alt = The NEXDEP Glovebox PVD system created and designed by Angstrom Engineering, which has white unit with integrated black glove ports for use within the sealed chamber. Various high-tech components are attached such as a digital monitor displaying the AERES software also made by Angstrom Engineering. The system displays logos for Inert, PURE LAB, and Angstrom Engineering. The entire setup highlights advanced technology and precision for physical vapor deposition processes in a controlled glovebox environment.
alt = A Nexdep PVD system designed by Angstrom Engineering, a compact, white metallic design. The system has a main processing chamber with controls and attachments on the exterior. A computer monitor displaying the 'AERES' software is on the right side.
alt = NEXDEP system by Angstrom Engineering, created for Physical Vapor Deposition (PVD). The system has components for sputtering and electron beam (e-beam) evaporation. There is a closed metal central chamber, a monitor and keyboard that operates Aeres software and various ports and connections for vacuum and deposition processes. The Angstrom Engineering logo is displayed on the system.

NEXDEP

Compact, Economical, Configurable Workhorse

The Nexdep PVD platform offers a balance between economy and versatility. It can be outfitted with the most robust process enhancements without taking up all the room in your lab or your budget.

Your research goals, production demands, and/or application end goals will inform how to outfit your Nexdep PVD platform.

Let’s work together to design the system that will be perfectly suited to your requirements.

SYSTEM BUILD OPTIONS

System Model Features

Sputtering
  • RF, DC, pulsed DC, HIPIMS, and reactive. 
  • Circular, linear & cylindrical cathodes are available.
Thermal Evaporation
  • Utilize a wide range of boats, filaments & crucible heaters.
  • Auto-tuning for precise rate control.
Electron Beam Evaporation
  • Wide range of source power and power supply options available.
  • Programmable sweep controller with recipe storage.
  • Torque sensing crucible indexer detects pocket jams.
  • Option for multiple e-beam sources in the chamber.
Plasma & Ion Beam
  •  A range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.

Fixturing & Automation

Explore the enhancements and options that can be added to your EvoVac platform. Creating a system specifically engineered to meet your research and process requirements. These systems can be customized to any degree to meet the user’s application needs using the ideal components as well as precise process development.

 

Substrate Fixturing Enhancements

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Stage Heating & Cooling
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Variable Angle Stage
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Roll to Roll Coating
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Masking Shutter
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Planetary & Dome Fixtures
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Substrate Biasing
Stage Heating & Cooling

alt = Close-up of a heated stage. The central area is glowing with an orange light, indicating high temperatures. The surroundings are dark, contrasting with the bright heated section in the middle. It is enclosed, with visible metal parts that guide the heat.

Variable Angle Stage

alt = Sputter ion beam variable angle deposition system. It has multiple angled holders, sensors, nozzles arranged in a high vacuum chamber. It is design for depositing thin films at various angles.

Roll to Roll Coating

alt = Close up of a roll-to-roll machine. It has metal components and cylindrical rollers for continuous processing of materials. It has rotating parts made by Angstrom Engineering's commitment to precision.

Masking Shutter

Planetary & Dome Fixtures

alt = Close up of an E-beam planetary system showing the internal variety of fixtures and central platform in a metal chamber. This is designed for electron beam processing with precise manufacturing.

Substrate Biasing

alt = Interior of an RF (Radio Frequency) bias stage. A circular platform illuminated by orange and purple light. It is used to add a controlled bias to a substrate.

Substrate and Shadow Mask Automation Options

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Load Locks
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Substrate Transfer
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Mask Handling
Load Locks

Substrate Transfer

alt = View inside a substrate transfer system. It has a metallic structure with multiple layers to support and move substrates. The central area is lit up and engineered for controlled and accurate handling. This indicates the highly precise engineering done by Angstrom Engineering in their systems.

Mask Handling

alt = close up view of a circular shadow mask. It is held by a blue gloved hand and has a grid of square cut outs. The precise design and clean edges shows the thorough job that Angstrom Engineering does.

Advanced Process Control Software

  • PC/PLC-controlled recipes for single, batch, or automated processes.
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High-resolution control provides impressive low-rate stability and consistent doping ratios.
  • The central control station manages each module and schedules the processes in each chamber.
  • Independent control of multiple chambers (if applicable).
  • Complex recipes can be created and modified easily.
  • Automatic PID control loop tuning significantly reduces process development time.

Learn more about Aeres®.

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Dr. Nava Ariel-Sternberg
Director of Columbia Nano Initiative Facilities
Columbia University 

The two deposition systems we purchased from Angstrom Engineering® (EvoVac and Nexdep) are being heavily used in our 300-user clean room lab in various research projects and applications. The systems are ‘workhorses,’ highly reliable and user-friendly. Working with Angstrom Engineering®​ has been a pleasure to me and my staff and we are very happy we chose to purchase our deposition systems from your company.