Platforms

Platforms

Covap

Nexdep

Amod

EvoVac

Box Coater

Nebula

alt = The NEXDEP Glovebox PVD system created and designed by Angstrom Engineering, which has white unit with integrated black glove ports for use within the sealed chamber. Various high-tech components are attached such as a digital monitor displaying the AERES software also made by Angstrom Engineering. The system displays logos for Inert, PURE LAB, and Angstrom Engineering. The entire setup highlights advanced technology and precision for physical vapor deposition processes in a controlled glovebox environment.
alt = A Nexdep PVD system designed by Angstrom Engineering, a compact, white metallic design. The system has a main processing chamber with controls and attachments on the exterior. A computer monitor displaying the 'AERES' software is on the right side.
alt = NEXDEP system by Angstrom Engineering, created for Physical Vapor Deposition (PVD). The system has components for sputtering and electron beam (e-beam) evaporation. There is a closed metal central chamber, a monitor and keyboard that operates Aeres software and various ports and connections for vacuum and deposition processes. The Angstrom Engineering logo is displayed on the system.

NEXDEP

Compact, Economical, Configurable Workhorse

The Nexdep PVD platform offers a balance between economy and versatility. It can be outfitted with the most robust process enhancements without taking up all the room in your lab or your budget.

Your research goals, production demands, and/or application end goals will inform how to outfit your Nexdep PVD platform.

Let’s work together to design the system that will be perfectly suited to your requirements.

SYSTEM BUILD OPTIONS

System Model Features

Sputtering
  • RF, DC, pulsed DC, HIPIMS, and reactive. 
  • Circular, linear & cylindrical cathodes are available.
Thermal Evaporation
  • Utilize a wide range of boats, filaments & crucible heaters.
  • Auto-tuning for precise rate control.
Electron Beam Evaporation
  • Wide range of source power and power supply options available.
  • Programmable sweep controller with recipe storage.
  • Torque sensing crucible indexer detects pocket jams.
  • Option for multiple e-beam sources in the chamber.
Plasma & Ion Beam
  •  A range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.

Fixturing & Automation

Explore the enhancements and options that can be added to your EvoVac platform. Creating a system specifically engineered to meet your research and process requirements. These systems can be customized to any degree to meet the user’s application needs using the ideal components as well as precise process development.

 

Substrate Fixturing Enhancements

Substrate and Shadow Mask Automation Options

Advanced Process Control Software

  • PC/PLC-controlled recipes for single, batch, or automated processes.
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High-resolution control provides impressive low-rate stability and consistent doping ratios.
  • The central control station manages each module and schedules the processes in each chamber.
  • Independent control of multiple chambers (if applicable).
  • Complex recipes can be created and modified easily.
  • Automatic PID control loop tuning significantly reduces process development time.

Learn more about Aeres®.

Click Here

Dr. Nava Ariel-Sternberg
Director of Columbia Nano Initiative Facilities
Columbia University 

The two deposition systems we purchased from Angstrom Engineering® (EvoVac and Nexdep) are being heavily used in our 300-user clean room lab in various research projects and applications. The systems are ‘workhorses,’ highly reliable and user-friendly. Working with Angstrom Engineering® has been a pleasure to me and my staff and we are very happy we chose to purchase our deposition systems from your company.