EvoVac Physical Vapor Deposition Platform
The EvoVac PVD platform can do, and be, anything you need. It has a large chamber that can be outfitted with any source or process enhancement you require. The EvoVac physical vapor deposition platform is our most customizable single-chamber platform, so it can be outfitted with the tools for specific applications, or can become the versatile multi-source deposition workhorse suitable to the various unique users in your lab.
With its 500mm x 700mm baseplate, your EvoVac physical vapor deposition platform can accommodate up to 14 sources, a wide variety of PVD processes, and can be outfitted to achieve ultra-high vacuum (UHV). Your research goals, production demands, and/or application end-goals will inform how to outfit your EvoVac. Let’s work together to design the system that will be perfectly suited to your requirements.
Anything is possible with
this PVD platform
Deposition Source Options
RF, DC, pulsed DC, HIPIMS, and reactive. Circular, linear & cylindrical cathodes are available.
You can utilize a wide range of boats, filaments & crucible heaters. Auto-tuning ensures precise rate control.
Electron Beam Evaporation
A wide range of source power and power supply options are available. Programmable sweep controller with recipe storage is controlled through Aeres® software platform. A torque sensing crucible indexer detects pocket jams. There is room for multiple e-beam sources in the EvoVac chamber.
Plasma & Ion Beam Processing
We use a range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.
Substrate Fixturing Enhancements
Aeres® Advanced Process Control Software
The EvoVac physical vapor deposition platform’s design is terrific and the glovebox port is easy to work with. Last year, it was used 2269 hours, averaging over 6 hours a day every day of the year. It is the single most used piece of equipment at our facility, and essential to numerous research projects. As such, it is critical that downtime is minimized. The support Angstrom Engineering provides for service issues is exceptional, and unparalleled. My job would be significantly easier if I received the customer support Angstrom offers for the other instruments in our facility.
Dr. Ina Martin – Case Western Reserve University
This video shows an example of an EvoVac physical vapor deposition platform outfitted with several process enhancements, including Glovebox integration.
IS EVOVAC THE RIGHT SYSTEM FOR YOUR LAB?
Talk to us about it. You’ll get answers efficiently.
When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you: