EvoVac Physical Vapor Deposition Platform

The EvoVac PVD platform can do, and be, anything you need. It has a large chamber that can be outfitted with any source or process enhancement you require. The EvoVac physical vapor deposition platform is our most customizable single-chamber platform, so it can be outfitted with the tools for specific applications, or can become the versatile multi-source deposition workhorse suitable to the various unique users in your lab.

4 iterations of EvoVac, Angstrom Engineering's versatile workhorse physical vapor deposition evaporator.  It can be outfitted any number of ways depending on your process requirements.
EvoVac Physical vapor deposition pvd evaporator platform

With its 500mm x 700mm baseplate, your EvoVac physical vapor deposition platform can accommodate up to 14 sources, a wide variety of PVD processes, and can be outfitted to achieve ultra-high vacuum (UHV). Your research goals, production demands, and/or application end-goals will inform how to outfit your EvoVac. Let’s work together to design the system that will be perfectly suited to your requirements.

Anything is possible with

this PVD platform

  • Deposition Source Options

RF, DC, pulsed DC, HIPIMS, and reactive. Circular, linear & cylindrical cathodes are available.

Thermal Evaporation 
You can utilize a wide range of boats, filaments & crucible heaters. Auto-tuning ensures precise rate control.

Electron Beam Evaporation 
A wide range of source power and power supply options are available. Programmable sweep controller with recipe storage is controlled through Aeres® software platform. A torque sensing crucible indexer detects pocket jams. There is room for multiple e-beam sources in the EvoVac chamber.

Plasma & Ion Beam Processing 
We use a range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.

  • Aeres® Advanced Process Control Software

Screenshot of Aeres, a software platform that supports Angstrom Engineering's Physical vapor deposition systems
  • Simple to use yet highly advanced integrated software platform
  • PC/PLC controlled recipes for single, batch, or automated processes
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High resolution control provides impressive low rate stability and consistent doping ratios
  • Central control station manages each module and schedules the processes in each chamber
  • Independent control of multiple chambers (if applicable)
  • Complex recipes can be created and modified easily
  • Automatic PID control loop tuning significantly reduces process development time

The EvoVac physical vapor deposition platform’s design is terrific and the glovebox port is easy to work with. Last year, it was used 2269 hours, averaging over 6 hours a day every day of the year. It is the single most used piece of equipment at our facility, and essential to numerous research projects. As such, it is critical that downtime is minimized. The support Angstrom Engineering provides for service issues is exceptional, and unparalleled. My job would be significantly easier if I received the customer support Angstrom offers for the other instruments in our facility.

Dr. Ina Martin – Case Western Reserve University

This video shows an example of an EvoVac physical vapor deposition platform outfitted with several process enhancements, including Glovebox integration.

Talk to us about it. You’ll get answers efficiently.

When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you: