Source Management
Electron beam sources are available in a variety of configurations, but the flexibility provided by a multi-pocket source makes it the most common choice for research and development. Ensuring that each of the materials in the source are deposited properly requires careful management of the pocket carousel.
Different materials require different electron beam distributions to ensure a successful deposition.
For Materials That Melt
Like many metals, a concentrated beam spot will provide a tightly defined evaporation point.
For Materials That Sublimate
Like many ceramics, a concentrated beam spot would result in uneven and uncontrolled evaporation. A solution to this problem is to rapidly sweep the beam in a pattern which covers all surfaces of the material to evenly distribute the heat and provide a uniform deposition flux. Beam sweep controllers are standard on all multi-pocket electron beam sources.
Integrating multiple pockets to a single source requires motorized pocket indexing to change materials. During pocket indexing, it is possible for material which has accumulated on the source to break away and cause a pocket jam. If left undetected, a pocket jam can lead to material contamination and permanent damage to the deposition source.
Angstrom Engineering’s® solution to this problem involves using a pocket indexer with torque sensing pocket jam detection; should a pocket jam occur, the motor will disengage and operator will be notified to clear the jam prior to carrying out further processes.
Dr. Peter Lomax
University of Edinburgh, UK
We have an Angstrom Engineering sputter platform, as well as an electron beam evaporation tool. The software has made both systems, which are used for a wide range of materials, simple to use. Furthermore, the ability for the Angstrom team to remotely connect to the software and platform has been particularly useful. We have been very impressed with the level of communication from Angstrom Engineering, who have kept us informed at all stages of the design and delivery process, offering advice on facilities when needed. Service and support have also been excellent, with very rapid turnaround when ordering materials, which have arrived as quickly as our UK-based vendors.