Platforms

Platforms

Covap

Nexdep

Amod

EvoVac

Box Coater

Nebula

alt = A box coater PVD platform from Angstrom Engineering, a white system with the Angstrom Engineering logo on the front. The system has a centred rectangular chamber door, surrounded by mechanical components and tubing. To the left, there is a digital monitor and control panel that shows the Aeres platform.
alt = A Box Coater PVD platform from Angstrom Engineering, featuring a large front chamber door with metallic latches. The unit is white with blue and yellow stripes, and the Angstrom Engineering logo is displayed on the front. To the left, there is a digital monitor and control panel, emphasizing the advanced technology and precision controls of the physical vapor deposition system.
alt = A box coater PVD system from Angstrom Engineering with its coating chamber door open, revealing the inner technical components. The unit is white with the Angstrom Engineering logo on the front. To the left, there is a control panel with a digital monitor and keyboard for operations. The system is used for physical vapour deposition processes, emphasizing its advanced technology.

Box Coater

Production throughput, big progress.

Box Coater is a flexible, cleanroom-compatible coating platform capable of low to high-volume production, capable of active modelling and correction of film thickness non-uniformity, material yield, and throughput.

Your research goals, production demands, and/or application end goals will inform how to outfit your Box Coater. It is well-suited for a variety of applications, including metallization, optical coatings, sensing, and indium bump bond fabrication.

Let’s work together to design the system that will perfectly suit your requirements.

  • 100 mm – 1200 mm substrates
  • Wide variety of PVD processes
  • Option to be outfitted to achieve ultra-high vacuum (UHV)

SYSTEM BUILD OPTIONS

System Model Features

Sputtering
  • RF, DC, pulsed DC, HIPIMS, and reactive. 
  • Circular, linear & cylindrical cathodes are available.
Thermal Evaporation
  • Utilize a wide range of boats, filaments & crucible heaters.
  • Auto-tuning for precise rate control.
Electron Beam Evaporation
  • Wide range of source power and power supply options available.
  • Programmable sweep controller with recipe storage.
  • Torque sensing crucible indexer detects pocket jams.
  • Option for multiple e-beam sources in the chamber.
Plasma & Ion Beam
  •  A range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.

Fixturing & Automation

Explore the enhancements and options that can be added to your EvoVac platform. Creating a system specifically engineered to meet your research and process requirements. These systems can be customized to any degree to meet the user’s application needs using the ideal components as well as precise process development.

 

Substrate Fixturing Enhancements

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Stage Heating & Cooling
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Variable Angle Stage
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Roll to Roll Coating
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Masking Shutter
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Planetary & Dome Fixtures
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Substrate Biasing
Stage Heating & Cooling

alt = Close-up of a heated stage. The central area is glowing with an orange light, indicating high temperatures. The surroundings are dark, contrasting with the bright heated section in the middle. It is enclosed, with visible metal parts that guide the heat.

Variable Angle Stage

alt = Sputter ion beam variable angle deposition system. It has multiple angled holders, sensors, nozzles arranged in a high vacuum chamber. It is design for depositing thin films at various angles.

Roll to Roll Coating

alt = Close up of a roll-to-roll machine. It has metal components and cylindrical rollers for continuous processing of materials. It has rotating parts made by Angstrom Engineering's commitment to precision.

Masking Shutter

Planetary & Dome Fixtures

alt = Close up of an E-beam planetary system showing the internal variety of fixtures and central platform in a metal chamber. This is designed for electron beam processing with precise manufacturing.

Substrate Biasing

alt = Interior of an RF (Radio Frequency) bias stage. A circular platform illuminated by orange and purple light. It is used to add a controlled bias to a substrate.

Substrate and Shadow Mask Automation Options

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Load Locks
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Substrate Transfer
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Mask Handling
Load Locks

Substrate Transfer

alt = View inside a substrate transfer system. It has a metallic structure with multiple layers to support and move substrates. The central area is lit up and engineered for controlled and accurate handling. This indicates the highly precise engineering done by Angstrom Engineering in their systems.

Mask Handling

alt = close up view of a circular shadow mask. It is held by a blue gloved hand and has a grid of square cut outs. The precise design and clean edges shows the thorough job that Angstrom Engineering does.

Advanced Process Control Software

  • PC/PLC-controlled recipes for single, batch, or automated processes.
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High-resolution control provides impressive low-rate stability and consistent doping ratios.
  • The central control station manages each module and schedules the processes in each chamber.
  • Independent control of multiple chambers (if applicable).
  • Complex recipes can be created and modified easily.
  • Automatic PID control loop tuning significantly reduces process development time.

Learn more about Aeres®.

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Angstrom Engineering® has worked to make their equipment highly functional, but not overly complex to use. Whenever I call I get immediate assistance. In an extremely busy facility like Princeton’s MNFL, these qualities have made Angstrom my first choice for PVD tools.

Joe Palmer
MNFL, Princeton University