Platforms

Platforms

Covap

Nexdep

Amod

EvoVac

Box Coater

Nebula

alt = The EVOVAC load lock platform from Angstrom Engineering, featuring a, white unit with blue accents. The system includes a load lock chamber, advanced control panels, and a digital monitor with a keyboard for precise operation. Various pipes and cables are attached to the machine. The Angstrom Engineering logo is prominently displayed on the front. The platform is designed for efficient and precise physical vapour deposition processes, showcasing advanced technology and automation.
alt = The EVOVAC roll-to-roll PVD system from Angstrom Engineering, a large white system with an open front chamber door revealing the internal parts and rollers used for continuous material processing. The Angstrom Engineering logo is displayed on the unit. To the right, a digital monitor is attached, showing operational details on the Aeres software. The system emphasises advanced technology for efficient roll-to-roll physical vapour deposition processes.
alt= An EVOVAC roll-to-roll PVD system from Angstrom Engineering. The system is a compact, white unit with advanced components including a coating chamber, control panels, and a digital monitor with a keyboard. The Angstrom Engineering logo is displayed on the front of the unit. The design highlights the system's capability for continuous roll-to-roll physical vapour deposition processes, offering precision and automation for thin film applications.

Evovac

Anything is Possible

The EvoVac PVD platform can do, and be, anything you need. It has a large chamber that can be outfitted with any source or process enhancement you require.

The EvoVac physical vapor deposition platform is our most customizable single-chamber platform, so it can be outfitted with the tools for specific applications, or can become the versatile multi-source deposition workhorse suitable to the various unique users in your lab.

Let’s work together to design the system that will be perfectly suited to your requirements.

SYSTEM BUILD OPTIONS

System Model Features

Sputtering
  • RF, DC, pulsed DC, HIPIMS, and reactive. 
  • Circular, linear & cylindrical cathodes are available.
Thermal Evaporation
  • Utilize a wide range of boats, filaments & crucible heaters.
  • Auto-tuning for precise rate control.
Electron Beam Evaporation
  • Wide range of source power and power supply options available.
  • Programmable sweep controller with recipe storage.
  • Torque sensing crucible indexer detects pocket jams.
  • Option for multiple e-beam sources in the chamber.
Plasma & Ion Beam
  •  A range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.

Fixturing & Automation

Explore the enhancements and options that can be added to your EvoVac platform. Creating a system specifically engineered to meet your research and process requirements. These systems can be customized to any degree to meet the user’s application needs using the ideal components as well as precise process development.

 

Substrate Fixturing Enhancements

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Stage Heating & Cooling
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Variable Angle Stage
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Roll to Roll Coating
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Masking Shutter
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Planetary & Dome Fixtures
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Substrate Biasing
Stage Heating & Cooling

alt = Close-up of a heated stage. The central area is glowing with an orange light, indicating high temperatures. The surroundings are dark, contrasting with the bright heated section in the middle. It is enclosed, with visible metal parts that guide the heat.

Variable Angle Stage

alt = Sputter ion beam variable angle deposition system. It has multiple angled holders, sensors, nozzles arranged in a high vacuum chamber. It is design for depositing thin films at various angles.

Roll to Roll Coating

alt = Close up of a roll-to-roll machine. It has metal components and cylindrical rollers for continuous processing of materials. It has rotating parts made by Angstrom Engineering's commitment to precision.

Masking Shutter

Planetary & Dome Fixtures

alt = Close up of an E-beam planetary system showing the internal variety of fixtures and central platform in a metal chamber. This is designed for electron beam processing with precise manufacturing.

Substrate Biasing

alt = Interior of an RF (Radio Frequency) bias stage. A circular platform illuminated by orange and purple light. It is used to add a controlled bias to a substrate.

Substrate and Shadow Mask Automation Options

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Load Locks
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Substrate Transfer
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Mask Handling
Load Locks

Substrate Transfer

alt = View inside a substrate transfer system. It has a metallic structure with multiple layers to support and move substrates. The central area is lit up and engineered for controlled and accurate handling. This indicates the highly precise engineering done by Angstrom Engineering in their systems.

Mask Handling

alt = close up view of a circular shadow mask. It is held by a blue gloved hand and has a grid of square cut outs. The precise design and clean edges shows the thorough job that Angstrom Engineering does.

Advanced Process Control Software

  • PC/PLC-controlled recipes for single, batch, or automated processes.
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High-resolution control provides impressive low-rate stability and consistent doping ratios.
  • The central control station manages each module and schedules the processes in each chamber.
  • Independent control of multiple chambers (if applicable).
  • Complex recipes can be created and modified easily.
  • Automatic PID control loop tuning significantly reduces process development time.

Learn more about Aeres®.

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Dr. Ina Martin
Case Western Reserve University

The EvoVac design is terrific and the glovebox port is easy to work with.  Last year, it was used 2269 hours, averaging over 6 hours a day every day of the year.  It is the single most used piece of equipment at our facility, and essential to numerous research projects.  As such, it is critical that downtime is minimized.  The support Angstrom Engineering® provides for service issues is exceptional, and unparalleled.  My job would be significantly easier if I received the customer support Angstrom offers for the other instruments in our facility.