Box Coater PVD Platform
Box Coater is a flexible, cleanroom compatible coating platform capable of low to high volume production of 100 mm, 150 mm, 200 mm, and 300 mm substrates. The form factor provides excellent film thickness uniformity and has plenty of space for advanced fixturing options. All Box Coater platform configurations are capable of active modeling and correction of film thickness non-uniformity, material yield, and throughput.
With its customizable baseplate and dimensions, Box Coater PVD (physical vapor deposition) platform can accommodate a variety of sources and processes. Your research goals, production demands, and/or application end-goals will inform how to outfit your Box Coater. It is well-suited for a variety of applications, including metallization, optical coatings, sensing, and indium bump bond fabrication. Let’s work together to design the system that will be perfectly suited to your requirements.
Deposition Source Options
RF, DC, pulsed DC, HIPIMS, and reactive. Circular, linear & cylindrical cathodes are available.
You can utilize a wide range of boats, filaments & crucible heaters. Auto-tuning ensures precise rate control.
Electron Beam Evaporation
With the Box Coater PVD platform, a wide range of source power and power supply options are available. Programmable sweep controller with recipe storage is controlled through Aeres software platform. A torque sensing crucible indexer detects pocket jams. There is room for multiple e-beam sources in the Box Coater chamber.
Plasma & Ion Beam Processing
We use a range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.
Substrate Fixturing Enhancements
Aeres Advanced Process Control Software
Angstrom Engineering has worked to make their equipment highly functional, but not overly complex to use. Whenever I call I get immediate assistance. In an extremely busy facility like Princeton’s MNFL, these qualities have made Angstrom my first choice for PVD tools.
Joe Palmer – MNFL – Princeton University
IS A BOX COATER PVD PLATFORM THE RIGHT SYSTEM FOR YOUR LAB?
Talk to us about it. You’ll get answers efficiently.
When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you: