Covap Physical Vapor Deposition Platform

The Covap PVD platform offers a compact, economical, yet still robust solution for many process applications. Designed for the lab that requires a safe and reliable tool that produces repeatable, high quality thin films in a compact footprint.

Covap physical vapor deposition PVD platform that can have thermal resistive sources

Deposition sources are isolated to reduce thermal effects and cross contamination. The Covap PVD platform is equipped with a complete set of removable chamber shielding to ensure the chamber can be easily cleaned and maintained. Source and stage power, as well as pneumatic pressure are cut while the chamber is open, ensuring the highest level of safety. It can be integrated into a glovebox or selected in a standalone configuration.

Small but mighty

Covap physical vapor deposition PVD platform with an open clamshell vacuum chamber

  • Overview

  • Rectangular clam shell chamber for excellent accessibility
  • Materials and substrates can be loaded with ease even in a glovebox
  • The Covap Physical Vapor Deposition Platform provides unobstructed access for removing shielding, cleaning, and preparing system for the next run
  • Ready for glove box integration
  • Compact 600mm x 1000mm system footprint
  • Choose from 2 or 4 source configurations
  • Recipe based advanced multi-layer control
  • Sequential or co-deposition
  • Fixturing supports up to 100mm x 100mm substrates
  • Full system training included
  • QCM sensors carefully isolated to ensure there is no interference from adjacent source material
  • High vacuum provided by turbo-molecular pump
  • 2-year warranty with the most responsive support team in the industry
A technician working on the Covap physical vapor deposition pvd thermal evaporator
Vacuum chamber of the covap physical vapor deposition pvd system, featuring 4 thermal resistive sources
  • Source Configurations

  • Substrate sizes up to 100 mm x 100 mm can be easily mounted
  • Chamber can accommodate either 2 or 4 thermal-resistive sources

Out of all the systems I have used, yours is by far the most reliable, consistent and easy to use.

Dr. Marc Baldo – MIT

We have full parts and materials support for your deposition systems. Click on the video to find out more.

Please get in touch and we can collaborate on your project

When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you: