Amod Physical Vapor Deposition Platform
This PVD platform begins to allow for larger chamber throw distances, and the ability to accommodate more process enhancements.
With its 500mm x 500mm baseplate, your Amod physical vapor deposition platform can accommodate up to 10 sources and wide variety of PVD processes. Your research goals, production demands, and/or application end-goals will inform how to outfit your Amod. Let’s work together to design the system that will be perfectly suited to your requirements.
Not too big, not too small…It’s just right
Deposition Source Options
RF, DC, pulsed DC, HIPIMS, and reactive. Circular, linear & cylindrical cathodes are available.
With the Amod PVD platform, you can utilize a wide range of boats, filaments & crucible heaters. Auto-tuning ensures precise rate control.
Electron Beam Evaporation
A wide range of source power and power supply options are available. Programmable sweep controller with recipe storage is controlled through Aeres software platform. A torque sensing crucible indexer detects pocket jams. There is room for multiple e-beam sources in the Amod chamber.
Plasma & Ion Beam Processing
We use a range of ion sources for cleaning and film enhancements in the Amod physical vapor deposition platform, including glow discharge plasma cleaning.
Substrate Fixturing Enhancements
Aeres Advanced Process Control Software
The level of service and connectivity to their customers, answering your emails any time of day, and helping you trouble shoot from afar is above and beyond what I had ever seen before. That interaction is what has made me a die-hard customer from here on out.
Dr. Casey Smith – Texas State University
This video demonstrates a process enhancement (masking shutter) that is available on your Amod
WE WANT TO HEAR ABOUT YOUR PROCESS!
Please get in touch and we can collaborate on your project
When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you: