Recipe & Automation Software
Powerful enough for the most advanced user and complex recipes, yet simple enough for every user in the lab.
With 25 years of experience helping our partners achieve their process requirements, we created Aeres®, a software platform that solves many known limits in thin film deposition technology. When Aeres® is partnered with one of our PVD platforms, you have an intelligent tool that will save you a lot of time, effort, and resources.
Layer Transition Efficiency
Recipe Control
Create processes as simple or as complex as desired.
- Use the loaded templates to use or build custom sequences from scratch.
- Build recipes from a remote PC, then seamlessly transfer recipes to the deposition system PC.
- Aeres® can run entirely autonomously, or you can build manual control into recipes if desired.
- The unified data management system collects and logs all pertinent process information.
Pre-Deposition
Wafer prep, source ramp-up, and stabilization.
Layer Control
Thickness, rate, shuttering, and source idling.
Stage Control
Heating, cooling, rotation, angle, and biasing.
Gas and Pressure
Pressure stability and precise gas delivery
Automation
Press start and leave the system to perform all aspects of process runs, with precise repeatability.
Advanced Deposition Control
Partner with Angstrom Engineering®
Dr. Imalka Jayawardena
University of Surrey, United Kingdom
My experience using the system and the support from Angstrom Engineering has been fantastic. It’s a very easy, reliable system to use and I do recommend Angstrom products to collaborators who are looking to buy new systems. For future upgrades or new systems, Angstrom would be our first choice.