This page focuses on Angstrom’s approach to automation sequencing within the Nebula Cluster platform using Aeres control software. For a broader look at Nebula, please click here.
Angstrom has developed a cluster specific sequencing algorithm within Aeres control software in order to efficiently operate multi-module systems that can include cleaning stations, substrate and mask load locks, as well as multiple deposition chambers, also known as process modules.
Nebula uses a simple architecture wherein sequences are created by assigning substrate(s), mask(s), and deposition/cleaning recipe(s) to a particular cluster module; these sequences are then placed into a global queue to be processed in the order in which they were assigned by the user, typically utilizing recipes. Nebula provides powerful scheduling capability in a very simple to use platform.
Substrates and masks are first loaded into the appropriate module and given unique identifiers from the Aeres software platform. Once loaded substrates and masks have been defined within the software, the user has complete control over the sequences that follow and can build them as simple or complex as desired.
For instance, If you load 3 substrates and 3 masks into a load lock module into a Nebula cluster system that has 2 process modules (A & B), you can create a sequence that involves a deposition run of substrate 1, with mask 1, in process module A, followed by a deposition run of substrate 1, with mask 2, in process module B, followed by a deposition run of substrate 2, with mask 3, in process module A…etc. Any combination of steps can be achieved. In addition to this, several sequences can run simultaneously, further increasing efficiency.
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