Angstrom Engineering | Your Thin Film Partner

PVD platforms ranging from a single chamber evaporator to large multi-chamber clusters.

Easy-To-Use Thin Film Fabrication Equipment to help the hardest working labs create the future.

Angstrom Engineering makes reliable vacuum equipment, including physical vapor deposition (PVD) systems, chemical vapor deposition (CVD) instruments, and environmental and space simulation chambers. These systems are well thought out, easy to use, and strongly supported by our team. For research and product applications that require thin film deposition technology, an Angstrom system in your lab will allow you and your team to focus on the work without worrying about your equipment.

Thin Film Processes

Magnetron Sputtering

We employ every type of magnetron sputtering technique currently available, including RF, DC, DC pulsed, HIPIMS, large area linear, reactive gas, and low damange/facing target sputtering. We have built hundreds of systems that are now being used all over the world for long hours every day.

Thermal Evaporation

The classic physical vapor deposition technique, thermal evaporation is still used by many researchers to produce repeatable films for contacts, pure metal films, and exotic materials. Thermal evaporation is available on each of our platforms, and can easily be integrated into a variety of system configurations.

Electron Beam 

When high rates and pure films are required, an electron beam source can be employed. E-beam can also be useful for certain types of materials, like those that require higher temperatures. Adding a partial pressure of reactive gas, such as oxygen or nitrogen to the chamber during evaporation can be used to reactively deposit non-metallic films.

Ion Beam Processing

Many of our partners benefit from the use of an ion beam source with their systems. These sources add energy to the deposition flux, assisting the atoms therein, resulting in denser and purer films. An ion source can also prepare a substrate before deposition, as well as etch an existing film utilizing shadow masking techniques.


Aeres® is Angstrom’s advanced process control software. It provides the brain to our deposition systems, and has been built utilizing a modern user interface specifically for today’s most demanding thin film users and labs. This recipe based software platform takes care of every process in the system, freeing the user to focus on their innovative work. Tasks are handled in parallel, significantly reducing total fabrication times, resulting in higher throughput and productivity. Additional automated capabilities — like multiple substrate and mask cassettes in in-situ load lock chambers, automatic robotic transfer, and cluster integration —  can be implemented on your system.

Modern User Interface

Multi-substrate/mask cassettes

Robotic Transfer

Cluster Integration

Substrate Fixturing

There is a whole world of technologies that can add capabilities to your thin film deposition system. Some influence thin film properties like adhesion, density, and purity, while others increase efficiency and throughput. With over 600 systems in the field all over the world, we have extensive experience with each.

Twin Blade Masking Shutter

Substrate Tilting and Rotation

Substrate biasing

Roll to Roll

Heated & Cooled Substrates


Josephson Junctions

The fabrication of quantum bits requires several process elements, such as tilting substrates, electron beam sources, and precise gas flow management for the oxidation layer. Angstrom’s Quantum Series systems fulfill each requirement in a single, easy to use deposition platform. Our partners using Quantum Series are fabricating reliable quantum bits that meet and exceed the standards set out by this exciting field.

Ion Beam Sputter Deposition

Optical films require the purity and density that only ion beam sputter deposition (IBSD) can deliver. Angstrom’s Reticle platform is equipped with the process technology to produce the best films, as well as in-situ optical monitoring or spectroscopic ellipsometry to provide the ultimate precision for even the most complex optical coatings.


Perovskite’s unique, volatile properties require a specific strategy for vaporization, and Angstrom’s Perovskite Series systems will provide you with the feature set that will help you succeed in this field. Chamber and source cooling, appropriate pumps, and steel chambers, along with a customizable set of features specific to your work will provide you the tool to make significant progress.

Thin Film Batteries

Many of our partners are working to realize the potential of thin film batteries, and are using Angstrom’s lithium coaters to create the architectures. Cathode materials are often complex lithium-oxides such as LiCoO2, LiMn2O4, and LiFePO4. Anode materials are typically comprised of carbon based materials such as graphite, Li metal, or other metallic materials. Contact us now to learn more about how we can help with your work in thin film batteries.

OLED Devices & Materials

The worlds leading OLED device and materials development teams rely on Angstrom Engineering for their hardware and instrumentation. We have a lot of experience creating and implementing deposition strategies for the most demanding projects.

Indium Bumps

Indium bump bonds are a novel way to fabricate three dimensional flip chip devices for use in superconducting quantum electronics. These devices are simply fabricated using Angstrom Engineering’s physical vapor deposition systems.


From the time it was delivered, this laboratory system has performed nearly flawlessly, arguably extending our capabilities well beyond those currently attainable by any organic thin film laboratory in the world. I attribute the success of this entire system to the excellence of the engineering as well as the cooperative nature of the Angstrom team in taking our best designs and making them better during the system construction process.

Dr. Stephen Forrest – University of Michigan

The EvoVac design is terrific and the glovebox port is easy to work with.  Last year, it was used 2269 hours, averaging over 6 hours a day every day of the year.  It is the single most used piece of equipment at our facility, and essential to numerous research projects.  As such, it is critical that downtime is minimized.  The support Angstrom Engineering provides for service issues is exceptional, and unparalleled.  My job would be significantly easier if I received the customer support Angstrom offers for the other instruments in our facility.

Dr. Ina Martin – Case Western University

The two deposition systems we purchased from Angstrom Engineering (EvoVac and NexDep) are being heavily used in our 300-user clean room lab in various research projects and applications. The systems are ‘workhorses’, highly reliable and user friendly. Working with Angstrom Engineering has been a pleasure to me and my staff and we are very happy we chose to purchase our deposition systems from your company.

Dr. Nava Ariel-Sternberg – Director of Columbia Nano Initiative Facilities – Columbia University