Platform Lineup
The best way to find the right platform for your research needs is to get in touch.
From compact, two-source thermal evaporators to fully automated, multi-chamber powerhouse systems finely tuned to a specific application, we offer a range of tools that can be equipped with the deposition processes and enhancements tailored to your research and/or commercial objectives.
To find the platform that best fits your needs, speak to a specialist today.Â
Covap
Designed for the lab that requires a safe and reliable tool that produces repeatable, high-quality thin films in a compact footprint.
Nexdep
It can be outfitted with the most robust process enhancements without taking up all the room in your lab or your budget.
Amod
Chamber throw distances can be considered, along with more room for sources and enhancements.
EvoVac
It has a large chamber that can be outfitted with any source or process enhancement you require.
Box Coater
Capable of active modelling and correction of film thickness non-uniformity, material yield, and throughput. With it’s relative chamber sizes and potential deposition throw distances, this PVD platform offers a bridge from research to production.
Nebula
The dozens of Nebula Cluster integrated vacuum systems we have successfully deployed are specifically designed to meet our partners process requirements. The number and type of vacuum modules are customer selected and provide room for future expansion potential.
Process Focused Platforms
Deposition platforms to support your qubit fabrication, superconducting materials, and indium bump requirements.Â
Many of our partners are successfully problem-solving this material. We have identified and corrected a number of perovskite-specific process challenges.
Linear Sputter
Minimal throw distance between source and substrate allows for impressive rate and excellent material utilization. Production throughput is possible with these specialized PVD platforms.
RETICLE® IBSD
Ion Beam Sputter Deposition is the process standard for many optical thin films. Our IBSD platform is a very competitive workhorse that can bring your work in optics to the next level.
Space & Environmental Simulation
Our partners who create technologies bound for space rely on these pressure chambers to accurately simulate the various conditions their gear will face in the final frontier.
LPCVD
Graphene, carbon nanotubes, and a host of other materials and applications are possible with our chemical vapor deposition platform.