Linear Magnetron Sputtering

Linear magnetron sputter systems are designed both for thin films of semiconductors or metals on large area panels as well as for production throughput requiring a high rate of deposition on a quantity of samples. The strategy is most commonly used in display, photovoltaic, and semiconductor applications. In-line sputtering is particularly useful for depositing large areas of transparent conductive oxides (TCOs).

The large sputter source area along with minimal throw distance between source and substrate create the conditions required for both dramatically higher deposition rates compared to standard fixed-stage sputter systems, as well as excellent material utilization.