Platforms

Platforms

Covap

Nexdep

Amod

EvoVac

Box Coater

Nebula

alt = The AMOD PVD (physical vapor deposition) from Angstrom Engineering, with a closed front chamber door. The platform includes various high-tech components and a simplified setup for efficient operation. The Angstrom Engineering logo is prominently displayed on the front of the unit. To the right, a digital monitor and control panel are attached using the Aeres software. The design of this system represents its reliability and effectiveness for PVD deposition.
alt = The AMOD PVD physical vapour deposition platform from Angstrom Engineering, a compact white system with an open front chamber door revealing the internal water-cooled components. The Angstrom Engineering logo is largely displayed on the left side of the front of the unit. To the left side of the platform, a digital monitor and control panel Angstrom’s software called Aeres. The design highlights advanced technology, efficient cooling for sophisticated physical vapour deposition processes.
alt = The AMOD physical vapor deposition (PVD) platform from Angstrom Engineering, with a visible internal setup of high-tech components. The platform has an open upper chamber door showing process equipment. The Angstrom Engineering logo is prominently displayed on the front of the unit. To the left, there is a digital monitor and control panel displaying Aeres software. The design demonstrates effective and efficient PVD processes.

AMOD

Not too big. Not too small. Just right.

This PVD platform begins to allow for larger chamber throw distances, and the ability to accommodate more process enhancements.

Your research goals, production demands, and/or application end goals will inform how to outfit your Amod PVD platform.

Let’s work together to design the system that will be perfectly suited to your requirements.

SYSTEM BUILD OPTIONS

System Model Features

Sputtering
  • RF, DC, pulsed DC, HIPIMS, and reactive. 
  • Circular, linear & cylindrical cathodes are available.
Thermal Evaporation
  • Utilize a wide range of boats, filaments & crucible heaters.
  • Auto-tuning for precise rate control.
Electron Beam Evaporation
  • Wide range of source power and power supply options available.
  • Programmable sweep controller with recipe storage.
  • Torque sensing crucible indexer detects pocket jams.
  • Option for multiple e-beam sources in the chamber.
Plasma & Ion Beam
  •  A range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.

Fixturing & Automation

Explore the enhancements and options that can be added to your EvoVac platform. Creating a system specifically engineered to meet your research and process requirements. These systems can be customized to any degree to meet the user’s application needs using the ideal components as well as precise process development.

 

Substrate Fixturing Enhancements

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Stage Heating & Cooling
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Variable Angle Stage
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Roll to Roll Coating
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Masking Shutter
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Planetary & Dome Fixtures
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Substrate Biasing
Stage Heating & Cooling

alt = Close-up of a heated stage. The central area is glowing with an orange light, indicating high temperatures. The surroundings are dark, contrasting with the bright heated section in the middle. It is enclosed, with visible metal parts that guide the heat.

Variable Angle Stage

alt = Sputter ion beam variable angle deposition system. It has multiple angled holders, sensors, nozzles arranged in a high vacuum chamber. It is design for depositing thin films at various angles.

Roll to Roll Coating

alt = Close up of a roll-to-roll machine. It has metal components and cylindrical rollers for continuous processing of materials. It has rotating parts made by Angstrom Engineering's commitment to precision.

Masking Shutter

Planetary & Dome Fixtures

alt = Close up of an E-beam planetary system showing the internal variety of fixtures and central platform in a metal chamber. This is designed for electron beam processing with precise manufacturing.

Substrate Biasing

alt = Interior of an RF (Radio Frequency) bias stage. A circular platform illuminated by orange and purple light. It is used to add a controlled bias to a substrate.

Substrate and Shadow Mask Automation Options

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Load Locks
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Substrate Transfer
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Mask Handling
Load Locks

Substrate Transfer

alt = View inside a substrate transfer system. It has a metallic structure with multiple layers to support and move substrates. The central area is lit up and engineered for controlled and accurate handling. This indicates the highly precise engineering done by Angstrom Engineering in their systems.

Mask Handling

alt = close up view of a circular shadow mask. It is held by a blue gloved hand and has a grid of square cut outs. The precise design and clean edges shows the thorough job that Angstrom Engineering does.

Advanced Process Control Software

  • PC/PLC-controlled recipes for single, batch, or automated processes.
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High-resolution control provides impressive low-rate stability and consistent doping ratios.
  • The central control station manages each module and schedules the processes in each chamber.
  • Independent control of multiple chambers (if applicable).
  • Complex recipes can be created and modified easily.
  • Automatic PID control loop tuning significantly reduces process development time.

Learn more about Aeres®.

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The level of service and connectivity to their customers, answering your emails any time of day, and helping you trouble shoot from afar is above and beyond what I had ever seen before.  That interaction is what has made me a die-hard customer from here on out.

Dr. Casey Smith
Texas State University