EvoVac

This PVD platform can do, and be, anything you need.  It has a large chamber that can be outfitted with any source or process enhancement you require.  It is our most customizable single-chamber platform, so it can be outfitted with the tools for specific applications, or can become the versatile multi-source deposition workhorse suitable to the various unique users in your lab.

4 iterations of EvoVac, Angstrom Engineering's versatile workhorse physical vapor deposition evaporator.  It can be outfitted any number of ways depending on your process requirements.
EvoVac Physical vapor deposition pvd evaporator platform

With its 500mm x 700mm baseplate, your EvoVac can accomodate up to 14 sources and wide variety of PVD processes.  Your research goals, production demands, and/or application end-goals will inform how to outfit your EvoVac.  Let’s work together to design the system that will be perfectly suited to your requirements.

Anything is possible with

this PVD platform


A PVD physical vapor deposition baseplate and chamber featuring all 3 types of sources: electron beam e-beam ebeam, magnetron sputtering, and thermal resistive.
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    Deposition Source Options

Sputtering 
RF, DC, pulsed DC, and HiPIMs
Circular, linear & cylindrical cathodes available
Thermal Evaporation 
Wide range of boats, filaments & crucible heaters
Auto-tuning ensures precise rate control
Electron Beam Evaporation 
Wide range of of source power and power supply options
Programmable sweep controller with recipe storage
Torque sensing crucible indexer detects pocket jams
Room for multiple e-beam sources in chamber
Plasma & Ion Beam Processing 
Range of ion sources for cleaning and film enhancements
Glow discharge plasma cleaning


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    Substrate Fixturing & Masking Options

Heated and Cooled Stages

Physical vapor deposition substrate stage with a heating bulb

Variable Angle Stages

A variable angle stage, sometimes called a glad, or glancing angle deposition stage, in an Angstrom Engineering physical vapor deposition PVD vacuum chamber.

Roll to Roll Processing

A roll to roll flexible substrate stage in an Angstrom Engineering physical vapor deposition PVD vacuum chamber.

Load Locks

A mask and substrate parking chamber on an Angstrom Engineering physical vapor deposition system.  These, along with load locks can be integrated into any of our systems.

Mask/Substrate Auto Transfer

This image shows a vacuum chamber with e-beam and resistive sources, showcasing that we can utilize automatic mask and substrate transfer on any of our physical vapor deposition pvd platforms

Planetary Motion

Planetary motion  stage in a physical vapor deposition pvd vacuum chamber

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    Aeres Advanced Process Control Software

Screenshot of Aeres, a software platform that supports Angstrom Engineering's Physical vapor deposition systems
  • Simple to use yet highly advanced integrated software platform
  • PC/PLC controlled recipes for single, batch, or automated processes
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High resolution control provides impressive low rate stability and consistent doping ratios
  • Central control station manages each module and schedules the processes in each chamber
  • Independent control of multiple chambers (if applicable)
  • Complex recipes can be created and modified easily
  • Automatic PID control loop tuning significantly reduces process development time

The EvoVac design is terrific and the glovebox port is easy to work with.  Last year, it was used 2269 hours, averaging over 6 hours a day every day of the year.  It is the single most used piece of equipment at our facility, and essential to numerous research projects.  As such, it is critical that downtime is minimized.  The support Angstrom Engineering provides for service issues is exceptional, and unparalleled.  My job would be significantly easier if I received the customer support Angstrom offers for the other instruments in our facility.

Dr. Ina Martin – Case Western University


This video shows an example of an EvoVac outfitted with several process enhancements, including Glovebox integration.


WE WANT TO HEAR ABOUT YOUR PROCESS! 
Please get in touch and we can collaborate on your project

When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you:

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