This PVD platform can do, and be, anything you need. It has a large chamber that can be outfitted with any source or process enhancement you require. It is our most customizable single-chamber platform, so it can be outfitted with the tools for specific applications, or can become the versatile multi-source deposition workhorse suitable to the various unique users in your lab.
With its 500mm x 700mm baseplate, your EvoVac can accomodate up to 14 sources and wide variety of PVD processes. Your research goals, production demands, and/or application end-goals will inform how to outfit your EvoVac. Let’s work together to design the system that will be perfectly suited to your requirements.
Anything is possible with
this PVD platform
Deposition Source Options
RF, DC, pulsed DC, and HiPIMs
Circular, linear & cylindrical cathodes available
Wide range of boats, filaments & crucible heaters
Auto-tuning ensures precise rate control
Electron Beam Evaporation
Wide range of of source power and power supply options
Programmable sweep controller with recipe storage
Torque sensing crucible indexer detects pocket jams
Room for multiple e-beam sources in chamber
Plasma & Ion Beam Processing
Range of ion sources for cleaning and film enhancements
Glow discharge plasma cleaning
Substrate Fixturing & Masking Options
Heated and Cooled Stages
Variable Angle Stages
Roll to Roll Processing
Mask/Substrate Auto Transfer
Aeres Advanced Process Control Software
The EvoVac design is terrific and the glovebox port is easy to work with. Last year, it was used 2269 hours, averaging over 6 hours a day every day of the year. It is the single most used piece of equipment at our facility, and essential to numerous research projects. As such, it is critical that downtime is minimized. The support Angstrom Engineering provides for service issues is exceptional, and unparalleled. My job would be significantly easier if I received the customer support Angstrom offers for the other instruments in our facility.
Dr. Ina Martin – Case Western University
This video shows an example of an EvoVac outfitted with several process enhancements, including Glovebox integration.
WE WANT TO HEAR ABOUT YOUR PROCESS!
Please get in touch and we can collaborate on your project
When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you: