Induction Heating
Induction heating is a unique form of physical vapor deposition which provides a pathway to depositing high melting temperature materials without the radiation damage that can occur with other techniques. This is particularly helpful when creating devices or structures which are prone to damage from the x-rays emitted from e-beam sources or the high energy ions created in a sputter plasma, but require deposition temperatures that are too high for traditional ‘boat & filament’ style evaporation.
- Unlike traditional resistive evaporation, the induction source is designed to selectively induce eddy currents only in the material to be heated/deposited.
- Shorter heating and cooling times improve deposition efficiency and reduce material waste.
- Thermal isolation of the deposition material from a crucible, boat, or filament improves the purity of the deposition process.
Benefit:
Induction deposition enables high temperature evaporation processes while eliminating x-rays and plasma associated with competing methods.
Benefit:
The selective nature of induction heating improves both the purity and efficiency of an evaporation process
Common Materials Used:
