Covap

The Covap series offers a compact, economical, yet still robust solution for many process applications.  Designed for the lab that requires a safe and reliable tool that produces repeatable, high quality thin films in a compact footprint

Covap physical vapor deposition PVD platform that can have thermal resistive sources

Deposition sources are isolated to reduce thermal effects and cross contamination.  It is equipped with a complete set of removable chamber shielding to ensure the chamber can be easily cleaned and maintained.  Source and stage power, as well as pneumatic pressure are cut while the chamber is open, ensuring the highest level of safety.  It can be integrated into a glovebox or selected in a standalone configuration.

Small but mighty

Covap physical vapor deposition PVD platform with an open clamshell vacuum chamber

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    Overview

  • Rectangular clam shell chamber for excellent accessibility
  • Materials and substrates can be loaded with ease even in a glovebox
  • Covap provides unobstructed access for removing shielding, cleaning, and preparing system for the next run
  • Ready for glove box integration
  • Compact 600mm x 1000mm system footprint
  • Choose from 2 or 4 source configurations
  • Recipe based advanced multi-layer control
  • Sequential or co-deposition
  • Fixturing supports up to 100mm x 100mm substrates
  • Full system training included
  • QCM sensors carefully isolated to ensure there is no interference from adjacent source material
  • High vacuum provided by turbo-molecular pump
  • 2-year warranty with the most responsive support team in the industry
A technician working on the Covap physical vapor deposition pvd thermal evaporator
Vacuum chamber of the covap physical vapor deposition pvd system, featuring 4 thermal resistive sources
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    Source Configurations

  • Substrate sizes up to 100 mm x 100 mm can be easily mounted
  • Chamber can accomodate either 2 or 4 thermal-resistive sources

Out of all the systems I have used, yours is by far the most reliable, consistent and easy to use.

Dr. Marc Baldo – MIT


We have full parts and materials support for your deposition systems. Click on the video to find out more.


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