Linear Sputter

This series of systems allows for high throughput production on large substrates, can be seamlessly integrated into larger clusters of production tools, and provides impressive uniformity.

Linear sputter Physical vapor deposition pvd evaporator platform

Create devices on very large substrates, stacking multiple layers in a single run with great uniformity.  Even though the targets are larger than usual, the material is very efficiently utilized.

The tool to bring your product to market

Rectangular sputter cathode with argon plasma


  • Connector.

    Aeres Advanced Process Control Software

Screenshot of Aeres, a software platform that supports Angstrom Engineering's Physical vapor deposition systems
  • Simple to use yet highly advanced integrated software platform
  • PC/PLC controlled recipes for single, batch, or automated processes
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High resolution control provides impressive low rate stability and consistent doping ratios
  • Central control station manages each module and schedules the processes in each chamber
  • Independent control of multiple chambers (when applicable in cluster or connected configurations)
  • Complex recipes can be created and modified easily
  • Automatic PID control loop tuning significantly reduces process development time

WE WANT TO HEAR ABOUT YOUR PROCESS! 
Please get in touch and we can collaborate on your project

When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you:

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