This PVD platform begins to allow for larger chamber throw distances, and the ability to accomodate more process enhancements.
With its 500mm x 500mm baseplate, your Amod can accomodate up to 10 sources and wide variety of PVD processes. Your research goals, production demands, and/or application end-goals will inform how to outfit your Amod. Let’s work together to design the system that will be perfectly suited to your requirements.
Not too big, not too small…It’s just right
Deposition Source Options
RF, DC, pulsed DC, and HiPIMs
Circular, linear & cylindrical cathodes available
Wide range of boats, filaments & crucible heaters
Auto-tuning ensures precise rate control
Electron Beam Evaporation
Wide range of of source power and power supply options
Programmable sweep controller with recipe storage
Torque sensing crucible indexer detects pocket jams
Room for multiple e-beam sources in chamber
Plasma & Ion Beam Processing
Range of ion sources for cleaning and film enhancements
Glow discharge plasma cleaning
Substrate Fixturing & Masking Options
Heated and Cooled Stages
Variable Angle Stages
Roll to Roll Processing
Mask/Substrate Auto Transfer
Aeres Advanced Process Control Software
The level of service and connectivity to their customers, answering your emails any time of day, and helping you trouble shoot from afar is above and beyond what I had ever seen before. That interaction is what has made me a die-hard customer from here on out.
Dr. Casey Smith – Texas State University
This video showcases a process enhancement that Amod (as well as many our other PVD platforms) is capable of integrating.
WE WANT TO HEAR ABOUT YOUR PROCESS!
Please get in touch and we can collaborate on your project
When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you: