Amod

This PVD platform begins to allow for larger chamber throw distances, and the ability to accomodate more process enhancements.

Amod Physical vapor deposition pvd evaporator platform

With its 500mm x 500mm baseplate, your Amod can accomodate up to 10 sources and wide variety of PVD processes.  Your research goals, production demands, and/or application end-goals will inform how to outfit your Amod.  Let’s work together to design the system that will be perfectly suited to your requirements.

Not too big, not too small…It’s just right


Electron Beam ebeam e-beam source in a Physical vapor deposition pvd vacuum chamber evaporator
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    Deposition Source Options

Sputtering 
RF, DC, pulsed DC, and HiPIMs
Circular, linear & cylindrical cathodes available
Thermal Evaporation 
Wide range of boats, filaments & crucible heaters
Auto-tuning ensures precise rate control
Electron Beam Evaporation 
Wide range of of source power and power supply options
Programmable sweep controller with recipe storage
Torque sensing crucible indexer detects pocket jams
Room for multiple e-beam sources in chamber
Plasma & Ion Beam Processing 
Range of ion sources for cleaning and film enhancements
Glow discharge plasma cleaning


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    Substrate Fixturing & Masking Options

Heated and Cooled Stages

Physical vapor deposition substrate stage with a heating bulb

Variable Angle Stages

A variable angle stage, sometimes called a glad, or glancing angle deposition stage, in an Angstrom Engineering physical vapor deposition PVD vacuum chamber.

Roll to Roll Processing

A roll to roll flexible substrate stage in an Angstrom Engineering physical vapor deposition PVD vacuum chamber.

Load Locks

A mask and substrate parking chamber on an Angstrom Engineering physical vapor deposition system.  These, along with load locks can be integrated into any of our systems.

Mask/Substrate Auto Transfer

This image shows a vacuum chamber with e-beam and resistive sources, showcasing that we can utilize automatic mask and substrate transfer on any of our physical vapor deposition pvd platforms

Planetary Motion

Planetary motion  stage in a physical vapor deposition pvd vacuum chamber

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    Aeres Advanced Process Control Software

Screenshot of Aeres, a software platform that supports Angstrom Engineering's Physical vapor deposition systems
  • Simple to use yet highly advanced integrated software platform
  • PC/PLC controlled recipes for single, batch, or automated processes
  • Advanced data logging and process tracking ensure consistent and repeatable processes
  • High resolution control provides impressive low rate stability and consistent doping ratios
  • Central control station manages each module and schedules the processes in each chamber
  • Independent control of multiple chambers (if applicable)
  • Complex recipes can be created and modified easily
  • Automatic PID control loop tuning significantly reduces process development time

The level of service and connectivity to their customers, answering your emails any time of day, and helping you trouble shoot from afar is above and beyond what I had ever seen before.  That interaction is what has made me a die-hard customer from here on out.

Dr. Casey Smith – Texas State University


This video showcases a process enhancement that Amod (as well as many our other PVD platforms) is capable of integrating.


WE WANT TO HEAR ABOUT YOUR PROCESS! 
Please get in touch and we can collaborate on your project

When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We’re looking forward to hearing from you:

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